DRY ETCHING (MICROELECTRONICS)
  • BT
    MICROELECTRONICS/COMPONENTS, MATERIALS, CONSTRUCTION, PRODUCTION
  • UDC
    621.3.049.7,14
  • Descriptor GER
    TROCKENÄTZEN (MIKROELEKTRONIK)
  • Descriptor ENG
    DRY ETCHING (MICROELECTRONICS)
  • Descriptor FRE
    CORROSIFS SECS (MICROÉLECTRONIQUE)
  • Variant GER
    ÄTZEN/TROCKENÄTZEN (MIKROELEKTRONIK)
  • Variant ENG
    ETCHING/DRY ETCHING (MICROELECTRONICS)
  • Variant FRE
    SEC/CORROSIFS SECS (MICROÉLECTRONIQUE)
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Last data import from Alma: 1 January 2025