LIGA-TECHNOLOGY (MANUFACTURING PROCESS OF MICROSTRUCTURES)
  • BT
    MICROELECTRONICS/COMPONENTS, MATERIALS, CONSTRUCTION, PRODUCTION
  • UDC
    621.3.049.7,13
  • Descriptor GER
    LIGA-TECHNIK (HERSTELLUNGSVERFAHREN VON MIKROSTRUKTUREN)
  • Descriptor ENG
    LIGA-TECHNOLOGY (MANUFACTURING PROCESS OF MICROSTRUCTURES)
  • Descriptor FRE
    TECHNIQUE LIGA (PROCÉDÉ DE FABRICATION DE MICROSTRUCTURES)
  • Variant GER
    LIGA, LITHOGRAPHIE, GALVANOFORMUNG UND ABFORMUNG (HERSTSTELLUNG VON MIKROSTRUKTUREN)
  • Variant ENG
    LIGA, LITHOGRAPHY, ELECTROFORMING AND SHAPING (MANUFACTURING PROCESS OF MICROSTRUCTURES)
  • Variant FRE
    LIGA, LITHOGRAPHIE, ÉLECTROFORMATION ET DÉFORMATION (FABRICATION DE MICROSTRUCTURES)
  • RT
    MINIATURIZATION + MICROMODULES (MICROELECTRONICS)
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Last data import from Alma: 1 January 2025