CHEMICAL THIN-LAYER FORMATION (PHYSICS OF MOLECULAR SYSTEMS)
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BTPRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS)
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UDC539.232
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Descriptor GERCHEMISCH ERZEUGTE DÜNNE SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
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Descriptor ENGCHEMICAL THIN-LAYER FORMATION (PHYSICS OF MOLECULAR SYSTEMS)
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Descriptor FRECOUCHES MINCES FORMÉES CHIMIQUEMENT (PHYSIQUE DES SYSTÈMES MOLÉCULAIRES)
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Variant GERDÜNNE SCHICHTEN/CHEMISCH ERZEUGTE DÜNNE SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
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Variant ENGCHEMICAL COATING (PHYSICS OF MOLECULAR SYSTEMS)
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Variant ENGCOATING/CHEMICAL COATING (PHYSICS OF MOLECULAR SYSTEMS)
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Variant ENGCHEMICAL DEPOSITION OF THIN LAYERS (PHYSICS OF MOLECULAR SYSTEMS)
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Variant ENGDEPOSITION/CHEMICAL DEPOSITION (PHYSICS OF MOLECULAR SYSTEMS)
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NTCHEMICAL VAPOUR DEPOSITION, CVD (PRODUCTION ENGINEERING)